Substrate transport apparatus

ABSTRACT

A substrate transport apparatus including, a torsional motion driver member having an exterior perimeter circumscribing an axis of rotation of the torsional motion driver member, and a torsional motion follower member including a body portion and a bearing collar rotatably coupled to the body portion, the torsional motion follower member being coupled to the torsional motion driver member with a dimensionally substantially invariant interface, wherein the bearing collar is decoupled from the exterior perimeter of the torsional motion driver member so that the exterior perimeter, as a whole, is free of the bearing collar.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of non-provisonal application Ser.No. 16/354,954, filed Mar. 15, 2019, (now U.S. Pat. No. 11,574,830),which claims the benefit of, U.S. Provisional Patent Application No.62/644,053 filed on Mar. 16, 2018, the disclosure of which areincorporated herein by reference in their entireties.

BACKGROUND 1. Field

The exemplary embodiments generally relate to automated processingequipment, and more particularly, to substrate transport apparatus.

2. Brief Description of Related Developments

Generally, in semiconductor processing substrates are placed atprocessing locations in predetermined positions. The substrates areplaced at the predetermined positions by substrate transport apparatus.These substrate transport apparatus are configured with drive systems(e.g., motors, pulleys, belts, bands, etc.) that allow for repeatableplacement of the substrates at the predetermined positions. For example,conventional substrate transport apparatus are generally placingsubstrate with about a 100 μm repeatability. However, as technologyadvances and features on the substrate become increasingly complex theplacement accuracy of conventional substrate transport apparatus may notbe sufficient to repeatedly place substrate in the processing positionswith a desired accuracy that corresponds to the increasingly complexfeatures.

It would be advantageous to provide a substrate transport withsubstantially invariant, rigid torque couplings connecting an endeffector of the substrate transport with a drive to, for example,substantially limit an impact of motor hysteresis between the drive andthe arm linkage.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features of the disclosed embodiment areexplained in the following description, taken in connection with theaccompanying drawings, wherein:

FIGS. 1A-1D are schematic illustrations of substrate processingapparatus in accordance with aspects of the disclosed embodiment;

FIGS. 1E and 1F are schematic illustrations of portions of the substrateprocessing apparatus of FIGS. 1A-1D in accordance with aspects of thedisclosed embodiment;

FIGS. 1G-1M are schematic illustrations of substrate processingapparatus in accordance with aspects of the disclosed embodiment;

FIGS. 2A-2D are schematic illustrations of portions of substratetransport drive sections in accordance with aspects of the disclosedembodiment;

FIGS. 3A-3E are schematic illustrations of transport arms in accordancewith aspects of the disclosed embodiment;

FIG. 4 is schematic illustrations of a substrate transport apparatus inaccordance with aspects of the disclosed embodiment;

FIG. 5 is a schematic illustration of a portion representative ofvarious aspects of the substrate transport apparatus illustrated inFIGS. 1-4 in accordance with aspects of the disclosed embodiment;

FIGS. 6A-6C are perspective views respectively of schematicillustrations of a portion of the substrate transport apparatusillustrated in FIG. 4 in accordance with aspects of the disclosedembodiment;

FIG. 7 is a cross section elevation schematic illustration of a portionof the substrate transport apparatus illustrated in FIG. 5 in accordancewith aspects of the disclosed embodiment;

FIG. 8 is an enlarged partial cross section elevation schematicillustration of a portion of the substrate transport apparatusillustrated in FIG. 5 in accordance with aspects of the disclosedembodiment;

FIG. 9 is an enlarged partial cross section elevation schematicillustration of a portion of the substrate transport apparatusillustrated in FIG. 5 in accordance with aspects of the disclosedembodiment;

FIG. 10 is a plan view schematic illustration of a portionrepresentative of various aspects of the substrate transport apparatusillustrated in FIG. 1-4 in accordance with aspects of the disclosedembodiment;

FIG. 11 is a partial cross section elevation schematic illustration of aportion of the substrate transport apparatus illustrated in FIG. 10 inaccordance with aspects of the disclosed embodiment; and

FIGS. 12A-12B are schematic illustrations of portions of the substratetransport apparatus illustrated in FIGS. 5 and 10 in accordance withaspects of the disclosed embodiment; and

FIG. 13 is a flow chart of a method of operation of a substratetransport in accordance with one or more aspects of the disclosedembodiment.

DETAILED DESCRIPTION

FIGS. 1A-1M are schematic illustrations of substrate processingapparatus in accordance with aspects of the disclosed embodiment.Although the aspects of the disclosed embodiment will be described withreference to the drawings, it should be understood that the aspects ofthe disclosed embodiment can be embodied in many forms. In addition, anysuitable size, shape or type of elements or materials could be used.

The aspects of the disclosed embodiment provide for methods andapparatus that effect high precision motion of a substrate transportapparatus 104A (FIG. 4 ). The high precision motion is motion thatprovides the substrate transport apparatus 104A with improvedrepeatability of placement of substrates over known substrate transportapparatus and, in some specific instances, repeatability of placement ofsubstrates better than about 100 microns, such that an end effector ofthe substrate transport apparatus 104A, and substrate carried thereon,repeatably extends along a wafer transport plane to place (or pick) thesubstrate. For example, as will be described in greater detail below,the aspects of the disclosed embodiment provide for the substratetransport apparatus 104A to include a dimensionally substantiallyinvariant interface 500 (FIG. 5 ) at the torque couplings of thesubstrate transport apparatus 104A. The dimensionally substantiallyinvariant interface 500 substantially increases the repeatability andaccuracy of the substrate transport apparatus 104A placing the substrateby, for example, substantially eliminating friction couplings (and theinconsistent or unrepeatable variance inherent thereto) within the drivesystem that may be affected (inconsistently) by environmental or otheroperating conditions of the substrate transport apparatus 104A.

In conventional substrate transport apparatus, variability in the robotperformance caused by, e.g., thermal effects, such as expansion andcontraction, wear of robot components, robot component shift, motorhysteresis, etc., may be a source of repeatability errors in, forexample, the placement and picking of substrates S from, e.g.,processing station 130. For example, the robot arm may undergo thermalexpansion and contraction (among other thermal effects and/or othervariabilities) as it is subjected to temperature variations duringprocessing. These temperature variations effect the positioning of therobot arm, such that a centered position (e.g., a predeterminedsubstrate hold position) of the end effector is offset or has apositional variance Δ_(PV). In order to reduce these variabilities of,e.g., the transport arm 315′ (FIG. 4 ) and increase the repeatabilityand accuracy, the couplings between a rotary driver member and a rotaryfollower member of the substrate transport apparatus 104A (e.g., torquecouplings) of the transport arm 315′ may be coupled with a dimensionallysubstantially invariant interface 500 (FIG. 5 ) that providesrepeatability, by virtue of its substantially invariant interfacethrough the full range of arm motion (along all paths and trajectoriesincluding optimal trajectories with applications of max motor, or ratedmotor τ with “bang-bang” control). A suitable example of arm motionrange and trajectory is described in U.S. Pat. No. 9,517,558, entitled“TIME-OPTIMAL TRAJECTORIES FOR ROBOTIC TRANSFER DEVICES,” issued Dec.13, 2016 (the disclosure of which is incorporated herein by reference inits entirety), though the disclosed embodiment is applicable to anysuitable trajectory. As will be described further below, thedimensionally substantially invariant interface 500 is a rigid,substantially non-slip interface to effect torque transfer of the totaltorque (for and across all torque transients during arm motion control),between the rotary drive member and the rotary follower member, via asubstantially non-friction torque transfer.

The processing apparatus 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100Hsuch as for example a semiconductor tool station, is shown in accordancewith aspects of the disclosed embodiment. Although a semiconductor toolstation is shown in the drawings, the aspects of the disclosedembodiment described herein can be applied to any tool station orapplication employing torque couplings. In one aspect the processingapparatus 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H, 100I are shownas having cluster tool arrangements (e.g., having substrate holdingstations connected to a central chamber) while in other aspects theprocessing apparatus may be a linearly arranged tool 100L, 100M, asdescribed in U.S. Pat. No. 8,398,355, entitled “Linearly DistributedSemiconductor Workpiece Processing Tool,” issued Mar. 19, 2013 (thedisclosure of which is incorporated herein by reference in itsentirety); however the aspects of the disclosed embodiment may beapplied to any suitable tool station. The apparatus 100A, 100B, 100C,100D, 100E, 100F, 100G, 100H, 100I generally include an atmosphericfront end 101, at least one vacuum load lock 102, 102A, 102B, 102C and avacuum back end 103. The at least one vacuum load lock 102, 102A, 102B,102C may be coupled to any suitable port(s) or opening(s) of the frontend 101 and/or back end 103 in any suitable arrangement. For example, inone aspect the one or more load locks 102, 102A, 102B, 102C may bearranged in a common horizontal plane in a side by side arrangement ascan be seen in FIGS. 1B-1D and 1G-1K. In other aspects the one or moreload locks may be arranged in a grid format such that at least two loadlocks 102A, 102B, 102C, 102D are arranged in rows (e.g., having spacedapart horizontal planes) and columns (e.g., having spaced apart verticalplanes) as shown in FIG. 1E. In still other aspects the one or more loadlock may be a single in-line load lock 102 as shown in FIG. 1A. In yetanother aspect the at least one load lock 102, 102E may be arranged in astacked in-line arrangement as shown in FIG. 1F. It should be understoodthat while the load locks are illustrated on end 100E1 or facet 100F1 ofa transport chamber 125A, 125B, 125C, 125D, 125E, 125F in other aspectsthe one or more load lock may be arranged on any number of sides 100S1,100S2, ends 100E1, 100E2 or facets 100F1-100F8 of the transport chamber125A, 125B, 125C, 125D, 125E, 125F. Each of the at least one load lockmay also include one or more wafer/substrate resting planes WRP (FIG.1F) in which substrates are held on suitable supports within therespective load lock. In other aspects, the tool station may have anysuitable configuration. The components of each of the front end 101, theat least one load lock 102, 102A, 102B, 102C and back end 103 may beconnected to a controller 110 which may be part of any suitable controlarchitecture such as, for example, a clustered architecture control. Thecontrol system may be a closed loop controller having a mastercontroller (which in one aspect may be controller 110), clustercontrollers and autonomous remote controllers such as those disclosed inU.S. Pat. No. 7,904,182 entitled “Scalable Motion Control System” issuedon Mar. 8, 2011 the disclosure of which is incorporated herein byreference in its entirety. In other aspects, any suitable controllerand/or control system may be utilized.

In one aspect, the front end 101 generally includes load port modules105 and a mini-environment 106 such as for example an equipment frontend module (EFEM). The load port modules 105 may be box opener/loader totool standard (BOLTS) interfaces that conform to SEMI standards E15.1,E47.1, E62, E19.5 or E1.9 for 300 mm load ports, front opening or bottomopening boxes/pods and cassettes. In other aspects, the load portmodules may be configured as 200 mm wafer/substrate interfaces, 450 mmwafer/substrate interfaces or any other suitable substrate interfacessuch as for example larger or smaller semiconductor wafers/substrates,flat panels for flat panel displays, solar panels, reticles or any othersuitable object. Although three load port modules 105 are shown in FIGS.1A-1D, 1J and 1K, in other aspects any suitable number of load portmodules may be incorporated into the front end 101. The load portmodules 105 may be configured to receive substrate carriers or cassettesC from an overhead transport system, automatic guided vehicles, personguided vehicles, rail guided vehicles or from any other suitabletransport method. The load port modules 105 may interface with themini-environment 106 through load ports 107. The load ports 107 mayallow the passage of substrates between the substrate cassettes and themini-environment 106. The mini-environment 106 generally includes anysuitable transfer robot 108 which may incorporate one or more aspects ofthe disclosed embodiment described herein. In one aspect the robot 108may be a track mounted robot such as that described in, for example,U.S. Pat. No. 6,002,840 issued on Dec. 14, 1999; U.S. Pat. No. 8,419,341issued Apr. 16, 2013; and U.S. Pat. No. 7,648,327 issued on Jan. 19,2010, the disclosures of which are incorporated by reference herein intheir entireties. In other aspects the robot 108 may be substantiallysimilar to that described herein with respect to the back end 103. Themini-environment 106 may provide a controlled, clean zone for substratetransfer between multiple load port modules.

The at least one vacuum load lock 102, 102A, 102B, 102C may be locatedbetween and connected to the mini-environment 106 and the back end 103.In other aspects the load ports 105 may be coupled substantiallydirectly to the at least one load lock 102, 102A, 102B, 102C or thetransport chamber 125A, 125B, 125C, 125D, 125E, 125F where the substratecarrier C is pumped down to a vacuum of the transport chamber 125A,125B, 125C, 125D and substrates are transferred directly between thesubstrate carrier C and the load lock or transfer chamber. In thisaspect, the substrate carrier C may function as a load lock such that aprocessing vacuum of the transport chamber extends into the substratecarrier C. As may be realized, where the substrate carrier C is coupledsubstantially directly to the load lock through a suitable load port anysuitable transfer apparatus may be provided within the load lock orotherwise have access to the carrier C for transferring substrates toand from the substrate carrier C. It is noted that the term vacuum asused herein may denote a high vacuum such as 10-5 Torr or below in whichthe substrates are processed. The at least one load lock 102, 102A,102B, 102C generally includes atmospheric and vacuum slot valves. Theslot valves of the load locks 102, 102A, 102B (as well as for theprocessing stations 130) may provide the environmental isolationemployed to evacuate the load lock after loading a substrate from theatmospheric front end and to maintain the vacuum in the transportchamber when venting the lock with an inert gas such as nitrogen. Aswill be described herein, the slot valves of the processing apparatus100A, 100B, 100C, 100D, 100E, 100F (as well as linear processingapparatus 100G, 100H) may be located in the same plane, differentvertically stacked planes or a combination of slot valves located in thesame plane and slot valves located in different vertically stackedplanes (as described above with respect to the load ports) toaccommodate transfer of substrates to and from at least the processingstations 130 and load locks 102, 102A, 102B, 102C coupled to thetransport chamber 125A, 125B, 125C, 125D, 125E, 125F. The at least oneload lock 102, 102A, 102B, 102C (and/or the front end 101) may alsoinclude an aligner for aligning a fiducial of the substrate to a desiredposition for processing or any other suitable substrate metrologyequipment. In other aspects, the vacuum load lock may be located in anysuitable location of the processing apparatus and have any suitableconfiguration.

The vacuum back end 103 generally includes a transport chamber 125A,125B, 125C, 125D, 125E, 125F one or more processing station(s) ormodule(s) 130 and any suitable number of substrate transport apparatus104 that includes one or more transport robots which may include one ormore aspects of the disclosed embodiments described herein. Thetransport chamber 125A, 125B, 125C, 125D, 125E, 125F may have anysuitable shape and size that, for example, complies with SEMI standardE72 guidelines. The substrate transport apparatus 104 and the one ormore transport robot will be described below and may be located at leastpartly within the transport chamber 125A, 125B, 125C, 125D, 125E, 125Fto transport substrates between the load lock 102, 102A, 102B, 120C (orbetween a cassette C located at a load port) and the various processingstations 130. In one aspect the substrate transport apparatus 104 may beremovable from the transport chamber 125A, 125B, 125C, 125D, 125E, 125Fas modular unit such that the substrate transport apparatus 104 complieswith SEMI standard E72 guidelines.

The processing stations 130 may operate on the substrates throughvarious deposition, etching, or other types of processes to formelectrical circuitry or other desired structure on the substrates.Typical processes include but are not limited to thin film processesthat use a vacuum such as plasma etch or other etching processes,chemical vapor deposition (CVD), plasma vapor deposition (PVD),implantation such as ion implantation, metrology, rapid thermalprocessing (RTP), dry strip atomic layer deposition (ALD),oxidation/diffusion, forming of nitrides, vacuum lithography, epitaxy(EPI), wire bonder and evaporation or other thin film processes that usevacuum pressures. The processing stations 130 are communicably connectedto the transport chamber 125A, 125B, 125C, 125D, 125E, 125F in anysuitable manner, such as through slot valves SV, to allow substrates tobe passed from the transport chamber 125A, 125B, 125C, 125D, 125E, 125Fto the processing stations 130 and vice versa. The slot valves SV of thetransport chamber 125A, 125B, 125C, 125D, 125E, 125F may be arranged toallow for the connection of twin (e.g., more than one substrateprocessing chamber located within a common housing) or side-by-sideprocess stations 130T1-130T8, single process stations 130S and/orstacked process modules/load locks (FIGS. 1E and 1F). As furtherdescribed below, the substrate transport apparatus effects therepeatability and accuracy throughout the range and variance oftemperatures and pressures/vacuum that the substrate transport apparatusis subjected to corresponding to processes within the respectiveprocessing apparatus.

It is noted that the transfer of substrates to and from the processingstation 130, load locks 102, 102A, 102B, 102C (or cassette C) coupled tothe transfer chamber 125A, 125B, 125C, 125D, 125E, 125F may occur whenone or more arms of the substrate transport apparatus 104 are alignedwith a predetermined processing station 130 along an axis of extensionand retraction R of the substrate transport apparatus 104. In accordancewith aspects of the disclosed embodiment one or more substrates may betransferred to a respective predetermined processing station 130individually or substantially simultaneously (e.g., such as whensubstrates are picked/placed from side-by-side or tandem processingstations as shown in FIGS. 1B, 1C, 1D and 1G-1K. In one aspect thesubstrate transport apparatus 104 may be mounted on a boom arm 143 (seee.g., FIGS. 1D and 1G-1I), where the boom arm 143 has a single boom linkor multiple boom links 121, 122, or linear carriage 144 such as thatdescribed in United States provisional patent application Nos.61/892,849 entitled “Processing Apparatus” and filed on Oct. 18, 2013and 61/904,908 entitled “Processing Apparatus” and filed on Nov. 15,2013 and International patent application number PCT/US13/25513 entitled“Substrate Processing Apparatus” and filed on Feb. 11, 2013, thedisclosures of which are incorporated herein by reference in theirentireties.

Referring now to FIG. 1L, a schematic plan view of a linear waferprocessing system 100G is shown where the tool interface section 2012 ismounted to a transport chamber module 3018 so that the interface section2012 is facing generally towards (e.g., inwards) but is offset from thelongitudinal axis X of the transport chamber 3018. The transport chambermodule 3018 may be extended in any suitable direction by attaching othertransport chamber modules 3018A, 3018I, 3018J to interfaces 2050, 2060,2070 as described in U.S. Pat. No. 8,398,355, previously incorporatedherein by reference. Each transport chamber module 3018, 3018A, 3018I,3018J includes any suitable wafer transport 2080, which may include oneor more aspects of the disclosed embodiment described herein, fortransporting wafers throughout the processing system 100G and into andout of, for example, processing modules PM. As may be realized, eachchamber module may be capable of holding an isolated or controlledatmosphere (e.g., N2, clean air, vacuum).

Referring to FIG. 1M, there is shown a schematic elevation view of anexemplary processing tool 100H such as may be taken along longitudinalaxis X of the linear transport chamber 416. In the aspect of thedisclosed embodiment shown in FIG. 1M, tool interface section 12 may berepresentatively connected to the transport chamber 416. In this aspect,interface section 12 may define one end of the tool transport chamber416. As seen in FIG. 1M, the transport chamber 416 may have anotherworkpiece entry/exit station 412 for example at an opposite end frominterface station 12. In other aspects, other entry/exit stations forinserting/removing workpieces from the transport chamber may beprovided. In one aspect, interface section 12 and entry/exit station 412may allow loading and unloading of workpieces from the tool. In otheraspects, workpieces may be loaded into the tool from one end and removedfrom the other end. In one aspect, the transport chamber 416 may haveone or more transfer chamber module(s) 18B, 18 i. Each chamber modulemay be capable of holding an isolated or controlled atmosphere (e.g.,N2, clean air, vacuum). As noted before, the configuration/arrangementof the transport chamber modules 18B, 18 i, load lock modules 56A, 56and workpiece stations forming the transport chamber 416 shown in FIG.1M is merely exemplary, and in other aspects the transport chamber mayhave more or fewer modules disposed in any desired modular arrangement.In the aspect shown, station 412 may be a load lock. In other aspects, aload lock module may be located between the end entry/exit station(similar to station 412) or the adjoining transport chamber module(similar to module 18 i) may be configured to operate as a load lock.

As also noted before, transport chamber modules 18B, 18 i have one ormore corresponding substrate transport apparatus 26B, 26 i, which mayinclude one or more aspects of the disclosed embodiment describedherein, located therein. The substrate transport apparatus 26B, 26 i ofthe respective transport chamber modules 18B, 18 i may cooperate toprovide the linearly distributed workpiece transport system 420 in thetransport chamber. In this aspect, the substrate transport apparatus 26Bmay have a general SCARA arm configuration (though in other aspects thetransport arms may have any other desired arrangement as describedbelow).

In the aspect of the disclosed embodiment shown in FIG. 1M, the armsand/or end effectors of the transport apparatus 26B may be arranged toprovide what may be referred to as fast swap arrangement allowing thetransport to quickly swap wafers from a pick/place location. Thesubstrate transport apparatus 26B may have any suitable drive section(e.g., coaxially arranged drive shafts, side by side drive shafts,horizontally adjacent motors, vertically stacked motors, etc.), forproviding each arm with any suitable number of degrees of freedom (e.g.,independent rotation about shoulder and elbow joints with Z axismotion). As seen in FIG. 1M, in this aspect the modules 56A, 56, 30 imay be located interstitially between transfer chamber modules 18B, 18 iand define suitable processing modules, load lock(s), buffer station(s),metrology station(s) or any other desired station(s). For example theinterstitial modules, such as load locks 56A, 56 and workpiece station30 i, each have stationary workpiece supports/shelves 56S1, 56S2, 30S1,30S2 that cooperate with the substrate transport apparatus to effecttransport or workpieces through the length of the transport chamberalong linear axis X of the transport chamber. By way of example,workpiece(s) may be loaded into the transport chamber 416 by interfacesection 12. The workpiece(s) may be positioned on the support(s) of loadlock module 56A with the substrate transport apparatus 15 of theinterface section. The workpiece(s), in load lock module 56A, may bemoved between load lock module 56A and load lock module 56 by thesubstrate transport apparatus 26B in module 18B, and in a similar andconsecutive manner between load lock 56 and workpiece station 30 i withsubstrate transport apparatus 26 i (in module 18 i) and between station30 i and station 412 with substrate transport apparatus 26 i in module18 i. This process may be reversed in whole or in part to move theworkpiece(s) in the opposite direction. Thus, in one aspect, workpiecesmay be moved in any direction along axis X and to any position along thetransport chamber and may be loaded to and unloaded from any desiredmodule (processing or otherwise) communicating with the transportchamber. In other aspects, interstitial transport chamber modules withstatic workpiece supports or shelves may not be provided betweentransport chamber modules 18B, 18 i. In such aspects, substratetransport apparatus of adjoining transport chamber modules may pass offworkpieces directly from one end effector or one transport arm to an endeffector or transport arm of another substrate transport apparatus tomove the workpiece through the transport chamber. The processing stationmodules may operate on the wafers through various deposition, etching,or other types of processes to form electrical circuitry or otherdesired structure on the wafers. The processing station modules areconnected to the transport chamber modules to allow wafers to be passedfrom the transport chamber to the processing stations and vice versa. Asuitable example of a processing tool with similar general features tothe processing apparatus depicted in FIG. 1D is described in U.S. Pat.No. 8,398,355, previously incorporated by reference in its entirety.

Referring now to FIGS. 2A, 2B, 2C, 2D in one aspect the substratetransport apparatus 104 includes at least one drive section 200, 200A,200B, 200C and at least one robot arm, such as robot arms 314, 315, 316,317, 318 described below. It is noted that the substrate transportapparatus 104 illustrated is exemplary and in other aspects may have anysuitable configuration substantially similar to that described in U.S.Application. Ser. No. 14/568,742 entitled “Substrate transportapparatus” and filed on Dec. 12, 2014, the disclosure of which isincorporated by reference herein in its entirety. One or more robot arms314, 315, 316, 317, 318 may be coupled to respective drive shafts of oneof drive sections 200, 200A-200C as described herein, at any suitableconnection CNX so that the rotation of the drive shaft(s) effectmovement of the respective transport arm(s) 314, 315, 316, 317, 318. Aswill be described below, in one aspect, the transport arms 314, 315,316, 317, 318 are interchangeable from a number of differentinterchangeable transport arms 314, 315, 316, 317, 318 so as to beswapped one transport arm for another transport arm at the connectionCNX with the drive section.

The at least one drive section 200, 200A, 200B, 200C is mounted to anysuitable frame of the processing apparatus 100A-100H. In one aspect, asnoted above, the substrate transport apparatus 104 may be mounted to alinear slide 144 or boom arm 143 (noting the boom arm may also includeone or more aspects of the present disclosure as described herein) inany suitable manner where the linear slide and/or boom arm 143 has adrive section substantially similar to drive section 200, 200A, 200B,200C described herein. The at least one drive section 200, 200A, 200B,200C may include a common drive section that includes a frame 200F thathouses one or more of a Z axis drive 270 and a rotational drive section282. An interior 200FI of the frame 200F may be sealed in any suitablemanner as will be described below. In one aspect the Z axis drive may beany suitable drive configured to move the transport arms 314, 315, 316,317, 318 along the Z axis. The Z axis drive is illustrated in FIG. 2A asa screw type drive but in other aspects the drive may be any suitablelinear drive such as a linear actuator, piezo motor, etc. The rotationaldrive section 282 may be configured as any suitable drive section suchas, for example, a harmonic drive section. For example, the rotationaldrive section 282 may include any suitable number of coaxially arrangedharmonic drive motors 280, such as can be seen in FIG. 2B where thedrive section 282 includes, for example, three coaxially arrangedharmonic drive motors 280, 280A, 280B. In other aspects the drives ofdrive section 282 may be located side-by-side and/or in a coaxialarrangement. In one aspect the rotational drive section 282 shown inFIG. 2A includes one harmonic drive motor 280 for driving shaft 280Showever, in other aspects the drive section may include any suitablenumber of harmonic drive motors 280, 280A, 280B (FIG. 2B) correspondingto, for example, any suitable number of drive shafts 280S, 280AS, 280BS(FIG. 2B) in the coaxial drive system.

The harmonic drive motor 280 may have high capacity output bearings suchthat the component pieces of a ferrofluidic seal 276, 277, are centeredand supported at least in part by the harmonic drive motor 280 withsufficient stability and clearance during desired rotation T andextension R movements of the substrate transport apparatus 104. It isnoted that the ferrofluidic seal 276, 277 may include several parts thatform a substantially concentric coaxial seal as will be described below.In this example the rotational drive section 282 includes a housing 281that houses one or more drive motor 280 which may be substantiallysimilar to that described above and/or in U.S. Pat. Nos. 6,845,250;5,899,658; 5,813,823; and 5,720,590, the disclosures of which areincorporated by reference herein in their entireties. The ferrofluidicseal 276, 277 can be toleranced to seal each drive shaft 280S, 280AS,280BS in the drive shaft assembly. In one aspect a ferrofluidic seal maynot be provided. For example, the drive section 282 may include driveshaving stators that are substantially sealed from the environment inwhich the transport arms operate while the rotors and drive shafts sharethe environment in which the arms operate. Suitable examples, of drivesections that do not have ferrofluidic seals and may be employed in theaspects of the disclosed embodiment include the MagnaTran® 7 andMagnaTran® 8 robot drive sections from Brooks Automation, Inc. which mayhave a sealed can arrangement as will be described below. It is notedthat drive shaft(s) 280S, 280AS, 280BS may also have a hollowconstruction (e.g., have a hole running longitudinally along a center ofthe drive shaft) to allow for the passage of wires 290 or any othersuitable items through the drive assembly for connection to, forexample, another drive section as described in U.S. patent applicationSer. No. 15/110,130 filed on Jul. 7, 2016 and published as US2016/0325440 on Nov. 10, 2016, the disclosure of which is incorporatedherein by reference in its entirety, any suitable position encoders,controllers, and/or the at least one transfer arm 314, 315, 316, 317,318, mounted to the drive section 200, 200A, 200B, 200C. As may berealized, each of the drive motors of drive section 200, 200A, 200B,200C may include any suitable encoders configured to detect a positionof the respective motor for determining a position of the end effector314E, 315E, 316E, 317E1, 317E1, 318E1, 318E2 of each transport arm 314,315, 316, 317, 318.

In one aspect the housing 281 may be mounted to a carriage 270C which iscoupled to the Z axis drive 270 such that the Z axis drive 270 moves thecarriage (and the housing 281 located thereon) along the Z axis. As maybe realized, to seal the controlled atmosphere in which the transportarms 314, 315, 316, 317, 318 operates from the interior 200FI of thedrive section 200, 200A, 200B, 200C (which may operate in an atmosphericpressure ATM environment), the drive section 200, 200A, 200B, 200C mayinclude one or more of the ferrofluidic seal 276, 277 described aboveand a bellows seal 275. The bellows seal 275 may have one end coupled tothe carriage 270C and another end coupled to any suitable portion of theframe 200F so that the interior 200FI of the frame 200F is isolated fromthe controlled atmosphere in which the transport arms 314, 315, 316,317, 318 operates.

In other aspects, as noted above, a drive having stators that are sealedfrom the atmosphere in which the transport arms operate without aferrofluidic seal, such as the MagnaTran® 7 and MagnaTran® 8 robot drivesections from Brooks Automation, Inc., may be provided on the carriage270C. For example, referring also to FIGS. 2C and 2D the rotationaldrive section 282 is configured so that the motor stators are sealedfrom the environment in which the transport arms operate while the motorrotors share the environment in which the transport arms operate.Referring to FIG. 2C a tri-axial rotational drive section 282 isillustrated. In this aspect there are three motors 280′, 280A′, 280B′,each having a rotor 280R′, 280AR′, 280BR′ coupled to a respective driveshaft 280A, 280AS, 280BS. Each motor 280′, 280A′, 280B′ also includes arespective stator 280S′, 280AS′, 280BS' which may be sealed from theatmosphere in which the transport arm(s) operate by a respective canseal 280SC, 280ACS, 280BCS. As may be realized any suitableencoders/sensors may be provided for determining a position of the driveshaft (and the arm(s) which the drive shaft(s) operates). As may berealized, in one aspect the drive shafts of the motors illustrated inFIG. 2C may not allow for wire 290 feed-through while in other aspectsany suitable seals may be provided so that wires may be passed through,for example, hollow drive shafts of the motors illustrated in FIG. 2C.

Drive section 200C, illustrated in FIG. 2D, includes a four motor nestedor concentric configuration such that four drive shafts 126S1-126S4 arearranged coaxially and four motors 126M1-126M4 are arranged in a nestedcoaxial arrangement. For example, motor 126M1 is nested within (e.g., isradially surrounded by) motor 126M2 and motor 126M3 is nested withinmotor 126M4. The nested motors 126M1, 126M2 are coaxially arrangedrelative to nested motors 126M3, 126M4 so that nested motors 126M1,126M2 are disposed coaxially above nested motors 126M3, 125M4. However,it should be understood that the motors 126M1-126M4 may have anysuitable arrangement such as a stacked arrangement, a side by side, orconcentric arrangement as shown in FIG. 2D. In other aspects, the motorsmay be low profile planar or “pancake” style robot drive configurationwhere the motors are concentrically nested within each other in a mannersubstantially similar to that described in U.S. Pat. No. 8,008,884entitled “Substrate Processing Apparatus with Motors Integral to ChamberWalls” issued on Aug. 30, 2011 and U.S. Pat. No. 8,283,813 entitled“Robot Drive with Magnetic Spindle Bearings” issued on Oct. 9, 2012, thedisclosures of which are incorporated by reference herein in theirentireties.

While the motors are illustrated as rotary motors in other aspects anysuitable motor(s) and/or suitable drive transmission(s) may be used suchas, for example, a direct drive linear motor, linear piezo electricmotors, linear inductance motors, linear synchronous motors, brushed orbrushless linear motors, linear stepper motors, linear servo motors,reluctance motors, etc. Examples of suitable linear motors are describedin, for example, U.S. patent application Ser. No. 13/286,186 entitled“Linear Vacuum Robot with Z Motion and Articulated Arm” filed on Oct.31, 2011; Ser. No. 13/159,034 entitled “Substrate Processing Apparatus”filed on Jun. 13, 2011 and U.S. Pat. No. 7,901,539 entitled “Apparatusand Methods for Transporting and Processing Substrates” issued Mar. 8,2011; U.S. Pat. No. 8,293,066 entitled “Apparatus and Methods forTransporting and Processing Substrates” issued Oct. 23, 2012; U.S. Pat.No. 8,419,341 entitled “Linear Vacuum Robot with Z Motion andArticulated Arm” issued Apr. 16, 2013; U.S. Pat. No. 7,575,406 entitled“Substrate Processing Apparatus” issued Aug. 18, 2009; and U.S. Pat. No.7,959,395 entitled “Substrate Processing Apparatus” issued Jun. 14,2011, the disclosures of which are incorporated herein by reference intheir entireties.

Referring now to FIGS. 3A-3E, the boom arm 143 and/or substratetransport apparatus 104 may include any suitable arm linkagemechanism(s). Suitable examples of arm linkage mechanisms can be foundin, for example, U.S. Pat. No. 7,578,649 issued Aug. 25, 2009, U.S. Pat.No. 5,794,487 issued Aug. 18, 1998, U.S. Pat. No. 7,946,800 issued May24, 2011, U.S. Pat. No. 6,485,250 issued Nov. 26, 2002, U.S. Pat. No.7,891,935 issued Feb. 22, 2011, U.S. Pat. No. 8,419,341 issued Apr. 16,2013 and U.S. patent application Ser. No. 13/293,717 entitled “Dual ArmRobot” and filed on Nov. 10, 2011 and Ser. No. 13/861,693 entitled“Linear Vacuum Robot with Z Motion and Articulated Arm” and filed onSep. 5, 2013 the disclosures of which are all incorporated by referenceherein in their entireties. In aspects of the disclosed embodiment, theat least one transfer arm of each substrate transport apparatus 104, theboom arm 143 and/or the linear slide 144 may be derived from aconventional SCARA arm 315 (selective compliant articulated robot arm)(FIG. 3C) type design, which includes an upper arm 315U, a band-drivenforearm 315F and a band-constrained end-effector 315E, or from atelescoping arm or any other suitable arm design, such as a Cartesianlinearly sliding arm 314 (FIG. 3B). Suitable examples of transport armscan be found in, for example, U.S. patent application Ser. No.12/117,415 entitled “Substrate Transport Apparatus with Multiple MovableArms Utilizing a Mechanical Switch Mechanism” filed on May 8, 2008 andU.S. Pat. No. 7,648,327 issued on January 19, 100G, the disclosures ofwhich are incorporated by reference herein in their entireties.

The operation of the transfer arms may be independent from each other(e.g., the extension/retraction of each arm is independent from otherarms), may be operated through a lost motion switch or may be operablylinked in any suitable way such that the arms share at least one commondrive axis. In still other aspects the transport arms may have any otherdesired arrangement such as a frog-leg arm 316 (FIG. 3A) configuration,a leap frog arm 317 (FIG. 3E) configuration, a bi-symmetric arm 318(FIG. 3D) configuration, etc. Suitable examples of transport arms can befound in U.S. Pat. No. 6,231,297 issued May 15, 2001, U.S. Pat. No.5,180,276 issued Jan. 19, 1993, U.S. Pat. No. 6,464,448 issued Oct. 15,2002, U.S. Pat. No. 6,224,319 issued May 1, 2001, U.S. Pat. No.5,447,409 issued Sep. 5, 1995, U.S. Pat. No. 7,578,649 issued Aug. 25,2009, U.S. Pat. No. 5,794,487 issued Aug. 18, 1998, U.S. Pat. No.7,946,800 issued May 24, 2011, U.S. Pat. No. 6,485,250 issued Nov. 26,2002, U.S. Pat. No. 7,891,935 issued Feb. 22, 2011 and U.S. patentapplication Ser. No. 13/293,717 entitled “Dual Arm Robot” and filed onNov. 10, 2011 and Ser. No. 13/270,844 entitled “Coaxial Drive VacuumRobot” and filed on Oct. 11, 2011 the disclosures of which are allincorporated by reference herein in their entireties. It is noted thatthe boom arm 143 may have a configuration substantially similar totransport arms 314, 315, 316, 317, 318 where the substrate transportapparatus 104 is mounted to the boom arm 143 in place of the endeffector 315E, 316E, 317E1, 317E1, 318E1, 318E2. As may be realized, thetransport arm(s) 314, 315, 316, 317, 318 are rotatably coupled to arespective drive section 200, 200A, 200B, 200C in accordance with theaspects of disclosed embodiment so that the respective drive section200, 200A, 200B, 200C effects substantially non-friction torque transferfrom the drive section 200, 200A, 200B, 200C to the transport arm 314,315, 316, 317, 318 to effect articulated motion of the transport arm314, 315, 316, 317, 318 relative to a frame, such as frame 200F or anysuitable frame of the processing tool 100A-100H. As will be described ingreater detail below, any suitable controller, such as controller 110,is coupled to the drive section 200, 200A, 200B, 200C in any suitablemanner to drive the drive section 200, 200A, 200B, 200C so as to effectthe articulation of the transport arm 314, 315, 316, 317, 318.

Referring now to FIG. 4 , an exemplary substrate transport apparatus104A is illustrated in accordance with aspects of the disclosedembodiment. The substrate transport apparatus 104A is substantiallysimilar to the substrate transport 104 described above with respect toFIGS. 1A-1D and 1G-1K and may be employed in any suitable atmospheric orvacuum environment such as those described above with respect to theprocessing apparatus 100A, 100B, 100C, 100D, 100E, 100F, 100G, 100H. Inone aspect the substrate transport apparatus 104A may be at leastpartially disposed in exemplary transport chamber 125′ which may besubstantially similar to any one of the transport chambers 125A, 125B,125C, 125D, 125E, 125F described above.

The substrate transport apparatus 104A includes a base 400BA having adrive section 200′ disposed therein. The substrate transport apparatus104A further includes a transport arm 315′ rotatably coupled to thedrive section 200′. The transport arm 315′ includes an upper arm 401, aforearm 402, and an end effector 403. It is noted that although thedrive section 200′ is depicted and described as being a tri-axial drivesection (substantially similar to drive section 282 described above withrespect to FIG. 2C); the drive section 200′ may have any suitable drivesection configuration, such as, those described above with respect toFIGS. 2A, 2B, and 2D. Further, while the transport arm 315′ is depictedand described as having a configuration substantially similar to theconventional SCARA arm 315 described above with respect to FIG. 3C, thetransport arm 315′ may have any suitable arm configuration, such as, thearm configurations 314, 316, 317, 318 described above. As may berealized, the substrate transport apparatus 104A may be any othersuitable substrate transport that has at least one torque couplingbetween a rotary drive member driving a rotary follower member.

As may be realized, the substrate transport apparatus 104A is connectedto and communicates with any suitable controller, such as the controller110 described above, so that the controller 110 may control themovements of the transport arm 315′. More specifically, the controller110 includes a controller module 110M that is configured to commandpositional movement of the substrate transport apparatus 104A to movethe end effector 403 of the transport arm 315′ to any desired positionwithin the processing apparatus 100A, 100B, 100C, 100D, 100E, 100F,100G, 100H (that is within reach of the substrate transport apparatus104A) in a known and controlled manner. For example the transport arm315′ may be coupled to the drive section 200′ which may be any suitabledrive section such as those described previously (i.e., a harmonicdrive, fixed base drive, three axis, etc.), and may include a controllermodule 110M having any suitable non-transitory program code foreffecting operation of the substrate transport apparatus 104A. In oneaspect, controller 110 may be configured as a bang-bang controller forgenerating time-optimal motions of at least a portion of the substratetransport apparatus 104A, such as the end effector 403, using maximumtorque τ_(max) of the drive section 200′. The drive section 200′ mayinclude any desired position determining devices (e.g., such as theposition or motor encoder 296; FIG. 2A) that is connected to thecontroller module 110M of the controller 110. The encoder 296 sends anysuitable signal(s) to the controller module 110M enabling the controllermodule 110M to determine a position of a predetermined point (such asthe end effector center or any other suitable location) on the transportarm 315′ relative to the transport chamber 125′.

In the exemplary embodiment shown in FIG. 4 , the drive section 200′ isdisposed in the base 400BA which houses a multi-axis drive spindleassembly 410, and three motors 420, 421, 422. The multi-axis drivespindle assembly 410 has three drive shafts 410A, 410B, 410C arrangedin, e.g., a coaxial configuration. In this aspect, the drive shafts410A, 410B, 410C are comprised of stainless steel, but may be any othersuitable material. As noted above, in other aspects, the drive sectionmay have more or fewer than three motors and more or fewer than threedrive shafts.

The three motors 420, 421, 422 each comprise a stator 420ST, 421ST,422ST and a rotor 420RT, 421RT, 422RT coupled to a respective one of aninner drive shaft 410A, a middle drive shaft 410B, and an outer driveshaft 410C. Each stator 420ST, 421ST, 422ST generally comprises anelectromagnetic coil and is stationarily attached to the base 400BA atdifferent vertical heights or locations along the base 400BA. Each rotor420RT, 421RT, 422RT is comprised of permanent magnets, but mayalternatively comprise a magnetic induction rotor which does not havepermanent magnets and may be rotatably coupled to each respective driveshaft 410A, 410B, 410C in accordance with the aspects of the disclosedembodiment described herein. Various bearings may be provided about thedrive shafts 410A, 410B, 410C and the base 400BA to allow each driveshaft 410A, 410B, 410C to be independently rotatable relative to eachother and the base 400BA. Each drive shaft 410A, 410B, 410C may beprovided with a suitable position sensor/encoder to provide positionsignals for a respective drive shaft 410A, 410B, 410C to the controller110 for determining the rotational position of the drive shafts 410A,410B, 410C relative to each other and/or relative to the base 400BA. Anysuitable sensor/encoder could be used, such as an optical or inductionsensor.

Still referring to FIG. 4 , the upper arm 401 of the transport arm 315′is coupled, through a dimensionally substantially invariant interface,to the outer drive shaft 410C of the drive section 200′ at a shoulder404 of the substrate transport apparatus 104A, so that the outer driveshaft 410C and upper arm 401 rotate together as a unit about a shoulderaxis of rotation Z1 with repeatability and accuracy as described furtherbelow. The upper arm 401 generally includes an upper arm housing 401Hand an upper arm bearing collar 401BC.

The forearm 402 is coupled, via an elbow drive shaft assembly 430, tothe upper arm 401 at an elbow 405 of the substrate transport apparatus104A. The forearm 402 generally includes a forearm housing 402H and aforearm bearing collar 402BC (dependent from the forearm housing 402Hand independent of elbow drive shaft assembly 430 within the housing ina manner similar to what will be described in greater detail below). Theinner drive shaft 410A is operably coupled to a first transmission 470in the upper arm 401. The first transmission 470 includes a drive pulley471, an idler pulley 472 and drive bands 473. The drive pulley 471 iscoupled, through a dimensionally substantially invariant interface, tothe inner drive shaft 410A (as will be described further below) and isconnected by drive bands 473 to the idler pulley 472. The idler pulley472 is coupled, through a dimensionally substantially invariantinterface, to an elbow outer drive shaft 431 (also as will be describedfurther below) of the elbow drive shaft assembly 430 so that the idlerpulley 472 and the elbow outer drive shaft 431 rotate accurately andrepeatably as a unit. The elbow drive shaft assembly 430 connecting theforearm 402 to the upper arm 401 is rotatably supported from the upperarm 401 by suitable bearings which allow the elbow drive shaft assembly430 to rotate about an elbow axis of rotation Z2 relative to the upperarm 401. The forearm 402 is coupled, through a dimensionallysubstantially invariant interface, to the elbow outer drive shaft 431 ofthe elbow drive shaft assembly 430 so that the elbow outer drive shaft431 and forearm 402 rotate accurately and repeatably as a unit about theaxis Z2. The forearm 402 is rotated about axis Z2 when the drive pulley471 of the first transmission 470 in the upper arm 401 is rotated byinner drive shaft 410A of drive section 200′. Thus, the inner driveshaft 410A of drive section 200′ is used to independently rotate theforearm 402 relative to the upper arm 401.

The end effector 403 is coupled to the forearm 402 by a wrist driveshaft 440 at a wrist 406 of the substrate transport apparatus 104A. Themiddle drive shaft 410B is operably coupled to a second transmission 480in the upper arm 401. The second transmission 480 in the upper arm 401includes a drive pulley 481, an idler pulley 482 and drive bands 483.The drive pulley 481 is coupled, through a dimensionally substantiallyinvariant interface, to the middle drive shaft 410B of the multi-axisdrive spindle assembly 410 in the drive section 200′. The idler pulley482 is coupled, through a dimensionally substantially invariantinterface, to an elbow inner drive shaft 432 of the elbow drive shaftassembly 430 (connecting the forearm 402 to the upper arm 401). Thedrive bands 483 connect the drive pulley 481 to the idler pulley 482.The elbow inner drive shaft 432 of the elbow drive shaft assembly 430 isoperably connected to a third transmission 490 in the forearm 402. Thethird transmission 490 in the forearm 402 includes the drive pulley 491,an idler pulley 492 and drive bands 493. The drive pulley 491 iscoupled, through a dimensionally substantially invariant interface, tothe elbow inner drive shaft 432 of the elbow drive shaft assembly 430.The idler pulley 492 is coupled, through a dimensionally substantiallyinvariant interface, to the wrist drive shaft 440. The drive bands 493connect the drive pulley 491 to idler pulley 492. The wrist drive shaft440 is rotatably supported from the forearm 402 by suitable bearingswhich allow the wrist drive shaft 440 to rotate about a wrist axis ofrotation Z3 relative to the forearm 402. The end effector 403 iscoupled, through a dimensionally substantially invariant interface, tothe wrist drive shaft 440 so as to rotate accurately and repeatably as aunit about the axis Z3. The end effector 403 is rotated about the axisZ3 when idler pulley 492 of the third transmission 490 is rotated by thedrive pulley 491. The drive pulley 491 in turn is rotated by elbow innerdrive shaft 432 of the elbow shaft assembly 430. The elbow inner driveshaft 432 is rotated when idler pulley 482 of the second transmission480 in the upper arm 401 is rotated by middle drive shaft 410B of thedrive section 200′. Hence, the end effector 403 may be independentlyrotated with respect to forearm 402 and upper arm 401 about the axis Z3with repeatability and accuracy as described further below.

Each of the rotatable couplings of the substrate transport apparatus104A is defined by a torque coupling between a rotary or torsionalmotion driver member 530 (i.e., referring to each of the drivingmembers, e.g., drive shafts 410A, 410B, 410C, 431, 432, 440; rotors420RT, 421RT, 422RT,; and idler pulleys 472, 482, 492) and a rotary ortorsional motion follower member 535 (i.e., referring to each of thedriven members, e.g., arm link 401, 402, 403; pulley 471, 481, 491; anddrive shafts 410A, 410B, 410C, 431, 432, 440). It is noted that in someinstances, a torsional motion driver member may also be a torsionalmotion follower member. For example, the elbow inner drive shaft 432 isa torsional motion follower member with respect to the torque couplingbetween the elbow inner drive shaft 432 and the idler pulley 482, whilealso being a torsional motion driver member with respect to the torquecoupling between the elbow inner drive shaft 432 and the drive pulley491. In one aspect, the rotary follower member 535 is located at leastpartially inside the rotary drive member 530, so that the rotary drivemember 530 is disposed around at least part of the rotary followermember 535 (e.g., the elbow inner drive shaft 432 is located at leastpartially inside the idler pulley 482). In another aspect, the rotarydriver member 530 is located at least partially inside the rotaryfollower member 535, so that the rotary follower member 535 is disposedaround at least part of the rotary drive member 530 (e.g., the elbowinner drive shaft 432 is located at least partially inside the drivepulley 491). Each torsional motion driver member 530 and respectivetorsional motion follower member 535 are coupled together to transfertorque between one another via a substantially non-friction torquetransfer with a dimensionally substantially invariant interface 500,500′ (FIGS. 5 and 10 ).

For example, referring to FIGS. 5-9 , the torque coupling 499 (FIG. 4 )between the torsional motion driver member 530 (e.g., elbow inner driveshaft 432) and the torsional motion follower member 535 (e.g., the drivepulley 491) will be described according to the aspects of the disclosedembodiments. It is noted that although aspects of the disclosedembodiment are described herein for convenience only with specificreference to the torque coupling 499 between, e.g., the elbow innerdrive shaft 432 and the drive pulley 491, one or more other torquecouplings of the substrate transport apparatus 104A may havesubstantially similar features and be coupled in substantially the sameway as previously noted.

As noted above, the torsional motion follower member 535 is coupled tothe torsional motion driver member 530. More specifically, the torsionalmotion follower member 535 is coupled to the torsional motion drivermember 530 with the dimensionally substantially invariant interface 500(also referred to as a contact torque transfer interface) to transfertorque from the torsional motion driver member 530 to the torsionalmotion follower member 535. In one aspect, the dimensionallysubstantially invariant interface 500 is a rigid, substantially non-slipinterface. The dimensionally substantially invariant interface 500 isconfigured so that the rigid, substantially non-slip interface has apredetermined repeatable bi-directional rigidity and substantiallynon-slip contact at the dimensionally substantially invariant interface500. The predetermined repeatable bi-directional rigidity andsubstantially non-slip contact effects torque transfer of the torque,from, e.g., the torsional motion driver member 530 to the torsionalmotion follower member 535, via substantially non-friction transfer. Asnoted above, the controller 110 may be a bang-bang controller configuredto apply max torque τ_(max) to the substrate transport apparatus 104A.The dimensionally substantially invariant interface 500 is configured tobe rigid and substantially invariant (with respect to producing motionrepeatability improved over known substrate transport apparatus and, insome specific instances, better than about 100 microns, across the fullrange of motion of the transient) for each direction of torque appliedto the torque couplings (i.e., bi-directional). For example, thedimensionally substantially invariant interface 500 is rigid andsubstantially, invariant from zero torque applied to max torque +τ_(max)applied and each transient therebetween. Further the dimensionallysubstantially invariant interface 500 is rigid and substantiallyinvariant throughout torque transients wherein the direction of appliedtorque is switched to the opposite direction (i.e., from +τ_(max) to−τ_(max) such as when the substrate transport apparatus 104A is fullyextended and the torque is switched to retract the substrate transportapparatus 104A). The dimensionally substantially invariant interface 500is rigid and substantially invariant through the application of eachtransient torque (i.e., from −τ_(max) through +τ_(max)). In one aspect,it is noted that τ_(max) is maximum rated motor torque, such as would beapplied by a controller effecting optimal (e.g., time-optimal)“bang-bang” control of the substrate transport apparatus motiontrajectory. In one aspect, the dimensionally substantially invariantinterface 500 is also configured to be rigid and substantially invariantat all times including during teaching/setup of the substrate transportapparatus 104A to operating at a steady state operating condition,including in vacuum and at any temperature. The dimensionallysubstantially invariant interface 500 is configured to be rigid andsubstantially invariant for all ranges of temperature during operationin, for example, the processing stations 130 which may operate withtemperatures of about 400° F. or more. The dimensionally substantiallyinvariant interface 500 is configured to be rigid and substantiallyinvariant both at “cold” temperatures (i.e., during initial warm-up orwhen not operating) and at operating temperatures (e.g., the operatingtemperature of the processing station 130 or of the transport chamber125A-F).

In this aspect, the torsional motion driver member 530 has an exteriorperimeter 530E (FIG. 6B) circumscribing the elbow axis of rotation Z2.The torsional motion driver member 530 includes a driver member positiondatum surface 699 and a seat surface 698 (FIG. 6B). The driver memberposition datum surface 699 defines, in part, the dimensionallysubstantially invariant interface 500 as will be further describedbelow.

The torsional motion follower member 535 includes a body portion 510 anda bearing collar 511 rotatably coupled to the body portion 510. The bodyportion 510 of the torsional motion follower member 535 includes afollower member position datum surface 599 and a follower engagementsurface 910 (FIG. 9 ). In one aspect, the torsional motion followermember 535 further includes at least one bearing 512 (FIG. 8 ) seatingthe body portion 510 on the bearing collar 511. The bearing collar 511includes threads 511T (FIG. 8 ) which are configured to couple with,e.g., threads 402T of the arm link housing 402H, e.g., the forearm 402.As can be best seen in FIGS. 7 and 8 , in one aspect, bearing races512A, 512B of the at least one bearing 512 depend from, for example, thetorsional motion follower member 535, independent of the torsionalmotion driver member 530 so that the bearing collar 511 is independentof the torsional motion driver member 530 (i.e., the bearing collar 511does not couple directly to the torsional motion driver member 530 suchthat the exterior perimeter 530E of the torsional motion driver member530, as a whole, is free of the bearing collar 511 (e.g., when comparedto a conventional SCARA torque coupling where the bearing collar dependsfrom or is seated directly on or against the drive shaft in a frictioncoupling). In one aspect, the bearing collar 511 is also decoupled fromthe dimensionally substantially invariant interface 500. The bearingcollar 511 may be comprised of stainless steel or any other suitablematerial and may have a low thermal expansion coefficient. For example,the bearing collar 511 may be comprised of 17-H900 stainless steel whichhas, e.g., a mean coefficient of thermal expansion of 5.8×10⁶ in/in/° F.(10.4 μm/m·K) at a temperature range of −100-70° F. (−73-21° C.), a meancoefficient of thermal expansion of 6.0×10⁶ in/in/° F. (10.8 μm/m·K) ata temperature range of 70-200° F. (21-93° C.), a mean coefficient ofthermal expansion of 6.3×10⁶ in/in/° F. (11.3 μm/m·K) at a temperaturerange of 70-600° F. (21-316° C.), or a mean coefficient of thermalexpansion of 6.5×10⁶ in/in/° F. (11.7 μm/m·K) at a temperature range of70-800° F. (21-427° C.). In one aspect, the bearing collar 511 comprisesa drive feature.

The driver member position datum surface 699 of the torsional motiondriver member 530 and the follower member position datum surface 599 ofthe body portion 510 of the torsional motion follower member 535 aredisposed in a predetermined alignment which sets a predeterminedposition of the torsional motion driver member 530 and the torsionalmotion follower member 535 with respect to each other. In one aspect,the dimensionally substantially invariant interface 500 has aconfiguration that complements the driver member position datum surface699 of the torsional motion driver member 530 and the follower memberposition datum surface 599 of the torsional motion follower member 535.With this configuration, the dimensionally substantially invariantinterface 500 engaging with the driver member position datum surface 699and the follower member position datum surface 599 effects a repeatablepredetermined concentric position of the dimensionally substantiallyinvariant interface 500 with respect to both the torsional motionfollower member 535 and the torsional motion driver member 530.

Still referring to FIGS. 5-9 , in one aspect, the substrate transportapparatus 104A further includes a torque bar 550 (also referred to as arotary torque transfer coupling), a first biasing member 560, and asecond biasing member 565. In one aspect, the torque bar 550 includes afirst end 550E1 having a first wedge surface 551 disposed thereon, asecond end 550E2 having a second wedge surface 552 disposed thereon, athrust face 555 disposed between the first and second ends 550E1, 550E2,and at least one torque bar attachment member 553, 554. The torque bar550 is configured to sit on (or be seated on) the seat surface 698 ofthe torsional motion driver member 530 and couple to the torsionalmotion driver member 530 via the torque bar attachment member 553, 554(e.g., threaded clearance cap bolts disposed for substantially onlyaxial loading from engagement with the torsional motion driver member530 and torque bar 550). The at least one torque bar attachment member553, 554 is configured to preload the torque bar 550 with respect to thetorsional motion driver member 530 and may be, e.g., a nut and bolt,screws, or any other suitable fastener member. The torque bar 550 isfurther configured to couple to the torsional motion follower member 535(as described herein), thereby effecting coupling of the torsionalmotion follower member 535 to the torsional motion driver member 530. Inother aspects, the torsional motion driver member and the torque barelement may be formed as a one piece unit (e.g., monolithic), so thatthe torsional motion driver member and the torque bar define a one pieceunit. Such, integral one piece unit of the torsional motion drivermember and the torque bar, is coupled similarly with the first andsecond biasing members 560, 565 to the torsional motion follower member535 as illustrated in FIGS. 5 and 9 .

In one aspect, the torque bar 550 defines, in part, the dimensionallysubstantially invariant interface 500. For example, in one aspect, thedimensionally substantially invariant interface 500 is disposed on thetorque bar 550 and engages simultaneously the torsional motion drivermember 530 and the torsional motion follower member 535. This engagementof the torque bar 550 with the torsional motion driver member 530 andthe torsional motion follower member 535, simultaneously, effects thetransfer of rotational motion/torsion (or torque) from the torsionalmotion driver member 530 to the torsional motion follower member 535. Inone aspect, the thrust face 555 of the torque bar 550 is configured toengage the driver member position datum surface 699 of the torsionalmotion driver member 530 and defines at least part of the dimensionallysubstantially invariant interface 500. The thrust face 555 engagementwith the driver member position datum surface 699 defines a controlleddistributed contact thrust interface 800 (FIG. 5 ) configured todistribute, from the torsional motion driver member 530, a substantiallyuniform thrust load across a face of the dimensionally substantiallyinvariant interface 500 to the torque bar 550. The preload between therespective thrust face 555 of the torque bar 550, and position datumsurface 699 of the torsional motion driver member 530, is applied (viaattachment member 553, 554) as described so that a substantially uniformthrust load is generated across the interface at τ_(max) and transientsin-between. In the aspect of the integral torsional motion driver memberand torque bar formed as a one piece unit, the thrust interface iseliminated, and the torque bar portion may be shaped in plan andcross-section to effect substantially uniform torque and motion transferload distribution commensurate with uniform transfer loads. As may berealized, the engagement between the torsional motion follower member535 and the integral monolithic torsional motion driver member andtorque bar remains decoupled from the exterior perimeter surface, of theintegral monolithic torsional motion driver member and torque bar,orientated tangential to rotation of the torsional motion driver member550 and the torsional motion follower member 535.

As seen best in FIGS. 6B and 6C, in one aspect, each of the first andsecond biasing members 560, 565 respectively includes a body 561, 566, awedge engagement surface 560WS, 565WS, a pin 562, 567, and an attachmentmember 563, 568. The first and second biasing members 560, 565 areconfigured to engage a respective first and second end 550E1, 550E2 ofthe torque bar 550. More specifically, the wedge engagement surface560WS, 565WS of the first and second biasing members 560, 565 areconfigured to engage a respective one of the first and second wedgesurfaces 551, 552 of the torque bar 550, defining a pressure surface.The engagement between each biasing member 560, 565 and the respectivefirst and second ends 550E1, 550E2 is configured to seat the torque bar550 (and the dimensionally substantially invariant interface 500) seatedon the driver member position datum surface 699, with respect to thefollower member position datum surface 599. Although the aspects of thedisclosed embodiment are described herein as having wedge surfaces, inother aspects, torque bar 550 may be seated in any suitable way, such asmachining through a side of the torsional motion follower member asdescribed below, or in any other suitable manner.

In one aspect, the pins 562, 567 are configured to pin (or locationallyfix in place) each respective biasing member 560, 565 to the torsionalmotion follower member 535 so that torque loads 930 are transferred fromthe torsional motion driver member 530 to the torsional motion followermember 535 through the pins 562, 567 (e.g., the torque loads are reactedat the follower engagement surface 910 as shown in FIG. 9 ). As may berealized, biasing members define links, oriented along and by the wedgeinterface and preload (to fully rotate) at the pin coupling so that thebiasing member is aligned rigidly with the dimensionally substantiallyinvariant interface 500. The biasing members are configured to besimultaneously pinned to the torsional motion follower member 535 andengaged with the respective first and second ends 550E1, 550E2 of thetorque bar 550 to transfer the torque loads 930 from the torsionalmotion driver member 530 through the torque bar 550 to the followerengagement surface 910 of the torsional motion follower member 535.

The attachment members 563, 568 may be substantially similar to thetorque bar fastener members 553, 554 described above. The attachmentmembers 563, 568 are configured to fasten and rigidly lock therespective first and second biasing member 560, 565 into position,substantially simultaneously engaging with the first and second ends550E1, 550E2 of the torque bar 550, where the pins 562, 567 pin therespective first and second biasing member 563, 568 to the torsionalmotion follower member 535. The attachment members 563, 568 forceengagement of the wedge engagement surface 560WS, 565WS of the first andsecond biasing members 563, 568 with the first and second wedge surfaces551, 552 of the torque bar 550 so that the torque bar 550 ispushed/forced against the driver member position datum surface 699 andthe follower member position datum surface 599. With the first andsecond biasing members 560, 565 fastened, a preload is applied to an endcontrol surface 920 (FIG. 9 ) of each biasing member 560, 565 at eachend 550E1, 550E2 of the torque bar 550. In one aspect, the attachmentmembers 563, 568 are further configured to act like springs whenfastened, such that any thermal growth variance is absorbed by theelasticity of the connection.

In one aspect, the first and second biasing members 560, 565, in afastened position, remain substantially detached from the torsionalmotion follower member 535 (i.e., there is a gap GAP (FIG. 9 ) betweeneach of the first and second biasing members 560, 565 and the bodyportion 510 of the torsional motion follower member 535). The biasingmembers 560, 565 maintaining a gap GAP between the body portion 510 ofthe torsional motion follower member 535 allows for a substantiallynon-friction transfer of torque from the torsional motion driver member530 to the torsional motion follower member 535.

In one aspect, the torque bar 550 defines an end controlled thrustinterface 900 at each of the first end 550E1 and the second end 550E2.Thrust or torque loads 930 are transferred from each of the endcontrolled thrust interfaces 900 to a respective follower engagementsurface 910 of the torsional motion follower member 535. In one aspect,the thrust load transfer of torque from each of the end controlledthrust interfaces 900 to the respective follower engagement surface 910is a substantially non-friction transfer. In one aspect, the endcontrolled thrust interfaces 900 are disposed to have a predeterminedsubstantially constant location with respect to the torsional motionfollower member 535 and the controlled distributed contact thrustinterface 800 (FIG. 5 ). In one aspect, compression loads aretransferred from the torsional motion driver member 530 to the thrustface 555 of the dimensionally substantially invariant interface 500 andfrom the end controlled thrust interface 900 of each of the first andsecond ends 550E1, 550E2 of the torque bar 550 to the torsional motionfollower member 535 so as to effect transfer of the torsional motion andtotal torque from the torsional motion driver member 530 across thedimensionally substantially invariant interface 500 substantially withthe compression loads decoupled from friction loads.

In one aspect, the torsional motion follower member 535 further includesa preloaded band to pulley coupling 515 connected to the torsionalmotion follower member 535. The preloaded band to pulley coupling 515 isconfigured to couple the drive bands 593 to the torsional motionfollower member 535. The preloaded band to pulley coupling 515 includesan attachment member 518, a band attachment member 519 (FIG. 6C), and abiasing member 570 (FIG. 6C). The attachment member 518 is configured tocouple the preloaded band to pulley coupling 515 to the body portion 510of the torsional motion follower member 535. The band attachment member519 is configured to attach the bands 593 to the preloaded band topulley coupling 515. The biasing member 570 is substantially similar tothe first and second biasing members 560, 565 described above andincludes an attachment member 517 and a pin 516 to pin the preloadedband to pulley coupling 515 to the body portion 510 of the torsionalmotion follower member 535 substantially similar to the pins 562, 567described above. The biasing member 570 is configured such that thrustloads 600 from the bands 593 are reacted by the torsional motionfollower member 535 at the pin 516 substantially similar as describedabove.

In another example, referring to FIGS. 10, 11, and 12A-12B, a torsionalmotion follower member 535′ (e.g., the upper arm 401) is coupled to atorsional motion driver member 530′ (e.g., the outer drive shaft 410C)with dimensionally substantially invariant interface 500′ to transfertorque from torsional motion driver member 530′ to the torsional motionfollower member 535′). The dimensionally substantially invariantinterface 500′ is substantially similar to the dimensionallysubstantially invariant interface 500 described above. In this aspect,the torsional motion driver member 530′ has an exterior perimeter 530E′circumscribing the shoulder axis of rotation Z1 and a pass-through 1000configured so that the middle and inner drive shafts 410B, 410A may passthrough a center of the torsional motion driver member 530′. Thetorsional motion driver member 530′ includes a driver member positiondatum surface 699′. The driver member position datum surface 699′defines, in part, the dimensionally substantially invariant interface500′ as will be further described below.

The upper arm 401 includes a body portion 510′ and a bearing collar 511′rotatably coupled to the body portion 510′ (FIG. 11 ) substantiallysimilar to that described above with respect to the torsional motionfollower member 535. The body portion 510′ of the upper arm 401 includesa follower member position datum surface 599′. Substantially similar tothe torsional motion driver member 530, the exterior perimeter 530E′ ofthe torsional motion driver member 530′ is a wholly free surface (i.e.,the bearing collar 511′ does not couple directly to the torsional motiondriver member 530′. Additionally, the bearing collar 511′ is alsodecoupled from the dimensionally substantially invariant interface 500′.

The driver member position datum surface 699′ of the torsional motiondriver member 530′ and the follower member position datum surface 599′of the body portion 510′ of the upper arm 401 are disposed in apredetermined alignment which sets a predetermined position of thetorsional motion driver member 530′ and the upper arm 401 with respectto each other. The dimensionally substantially invariant interface 500′has a configuration that complements the driver member position datumsurface 699′ of the torsional motion driver member 530′ and the followermember position datum surface 599′ of the upper arm 401 and effects arepeatable predetermined concentric position of the dimensionallysubstantially invariant interface 500′ with respect to both the upperarm 401 and the torsional motion driver member 530′.

Still referring to FIGS. 10, 11, and 12A-12B, the torque bar 550′includes a first end 550E1′, a second end 550E2′, a thrust face 555′disposed between the first and second ends 550E1′, 550E2′, and torquebar attachment member 553′, 554′. Substantially similar to the torquebar 550 described above, the torque bar 550′ is configured to couple tothe torsional motion driver member 530′ via the torque bar attachmentmembers 553′, 554′ to preload the torque bar with respect to thetorsional motion driver member 530′. The torque bar 550′ is furtherconfigured to couple to the upper arm 401, thereby effecting coupling ofthe upper arm 401 to the torsional motion driver member 530′. In thisaspect, the torque bar 550′ defines a portion of the pass-through 1000when the torque bar 550′ is coupled to the torsional motion drivermember 530′.

In one aspect, the torque bar 550′ defines, in part, the dimensionallysubstantially invariant interface 500′. For example, in one aspect, thedimensionally substantially invariant interface 500′ is disposed on thetorque bar 550′ and engages simultaneously the torsional motion drivermember 530′ and the upper arm 401. This engagement of the torque bar550′ with the torsional motion driver member 530′ and the upper arm 401,simultaneously, effects the transfer of torsion from the torsionalmotion driver member 530′ to the upper arm 401. In one aspect, thethrust face 555′ of the torque bar 550′ is configured to engage thedriver member position datum surface 699′ of the torsional motion drivermember 530′ and defines at least part of the dimensionally substantiallyinvariant interface 500′. The thrust face 555′ engagement with thedriver member position datum surface 699′ defines a controlleddistributed contact thrust interface 800′ configured to distribute, fromthe torsional motion driver member 530′, a substantially uniform thrustload across a face of the dimensionally substantially invariantinterface 500′ to the torque bar 550′.

The first and second biasing members 560′, 565′ may operatesubstantially similar to the biasing members 560, 565 described above.In another aspect, as illustrated in FIG. 12B, torque bar 550″ may bepinned to the upper arm 401 through one or more sides 401S1, 401S2 ofthe upper arm 401. Pins 1010 are inserted into recessed bores 1020 ateach end 550E1″, 550E2″ of the of the torque bar 550″. A tapered surface1021 within the recessed bores 1020 is configured to interface with atapered surface 1011 of the pins 1010 to position the torque bar 550″similar to that described above with respect to the biasing members 560,565.

In one aspect, the torque bar 550′ defines an end controlled thrustinterface at each of the first end 550E1′ and the second end 550E2′.Thrust loads are transferred from each of the end controlled thrustinterfaces to a respective follower engagement surface of the upper arm401. In one aspect, the thrust load transfer of torque from each of theend controlled thrust interfaces 900′ to the respective followerengagement surface 910′ is a substantially non-friction transfer. In oneaspect, the end controlled thrust interfaces are disposed to have apredetermined substantially constant location with respect to the upperarm 401 and the controlled distributed contact thrust interface 800′.

In one aspect, compression loads are transferred from the torsionalmotion driver member 530′ to the thrust face 555′ of the dimensionallysubstantially invariant interface 500′ and from the end controlledthrust interface of each of the first and second ends 550E1′, 550E2′ ofthe torque bar 550′ to the upper arm 401 in a manner similar to thatdescribed above so as to effect transfer of the torsional motion andtotal torque from the torsional motion driver member 530′ across thedimensionally substantially invariant interface 500′ substantially withthe compression loads decoupled from friction loads.

Referring now to FIG. 13 , an exemplary operation of the aspects of thedisclosed embodiment will be described. In one aspect, the method 1300includes providing a torsional motion follower member (FIG. 13 , Block1201), such as torsional motion follower member 535 including a bearingcollar 511 and a body portion 510. The method further includes couplingthe torsional motion follower member 535 to a torsional motion drivermember, such as torsional motion driver member 530, via a dimensionallysubstantially invariant interface 500 (FIG. 13 , Block 1202). Thebearing collar 511 is decoupled from an exterior perimeter 410BE of thetorsional motion driver member 530 so that the exterior perimeter 410BE,as a whole, is free of the bearing collar 511. The torsional motiondriver member 530 is rotated by the second transmission 480 which isdriven by the middle drive shaft 410B of the drive section 200′. Torqueprovided to the torsional motion driver member 530 by the secondtransmission 480 is transferred to the torsional motion follower member535 via the dimensionally substantially invariant interface 500.

In one aspect, the method further includes coupling the torsional motionfollower member 535 to the torsional motion driver member 530 with atorque bar 550. The torque bar 550 engages, simultaneously, thetorsional motion driver member 530 and the torsional motion followermember 535 and effects transfer of torsion from the torsional motiondriver member 530 to the torsional motion follower member 535 (FIG. 13 ,Block 1203). In one aspect, torque bar 550 defines an end controlledthrust interfaces 900 at each of a first end 550E1 and a second end550E2. Thrust loads are transferred from each of the end controlledthrust interfaces 900 to a respective follower engagement surface 910 ofthe torsional motion follower member 535. In one aspect, the methodfurther comprises transferring compression loads from the torsionalmotion driver member 530 to the thrust face 555 of the dimensionallysubstantially invariant interface 500 and from the end controlled thrustinterface 900 of each of the first and second ends 550E1, 550E2 to thetorsional motion follower member 535 so as to effect transfer of thetorsional motion and total torque from the torsional motion drivermember 530 across the dimensionally substantially invariant interface500 substantially with the compression loads decoupled from frictionloads.

In accordance with one or more aspects of the disclosed embodiments asubstrate transport apparatus is provided. The substrate transportapparatus including a torsional motion driver member having an exteriorperimeter circumscribing an axis of rotation of the torsional motiondriver member, and a torsional motion follower member including a bodyportion and a bearing collar rotatably coupled to the body portion, thetorsional motion follower member being coupled to the torsional motiondriver member with a dimensionally substantially invariant interface,wherein the bearing collar is decoupled from the exterior perimeter ofthe torsional motion driver member so that the exterior perimeter, as awhole, is free of the bearing collar.

In accordance with one or more aspects of the disclosed embodiments thebearing collar is decoupled from an exterior perimeter surfaceorientated tangential to rotation of the torsional motion driver memberand the torsional motion follower member, so that the exterior perimetersurface orientated tangential to rotation of the torsional motion drivermember and the torsional motion follower member, as a whole, is free ofthe bearing collar.

In accordance with one or more aspects of the disclosed embodiments thebearing collar is decoupled from the dimensionally substantiallyinvariant interface.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member has a driver member position datumsurface and the torsional motion follower member has a follower memberposition datum surface, wherein the driver member position datum surfaceand the follower member position datum surface are in a predeterminedalignment setting a predetermined position of the torsional motiondriver member and the torsional motion follower member with respect toeach other.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface has a configuration thatcomplements the driver member position datum surface of the torsionalmotion driver member and the follower member position datum surface ofthe torsional motion follower member so that engagement therewith by thedimensionally substantially invariant interface effects a repeatablepredetermined position of the dimensionally substantially invariantinterface with respect to both the torsional motion follower member andthe torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments therepeatable predetermined position is a concentric position.

In accordance with one or more aspects of the disclosed embodiments atorque bar configured to couple the torsional motion follower member tothe torsional motion driver member, wherein the dimensionallysubstantially invariant interface is disposed on the torque bar andengages simultaneously the torsional motion driver member and thetorsional motion follower member and effects transfer of torsion fromthe torsional motion driver member to the torsional motion followermember.

In accordance with one or more aspects of the disclosed embodiments thetorque bar includes a first end, a second end, and a thrust facedisposed between the first and second ends, wherein the thrust facedefines at least part of the dimensionally substantially invariantinterface and is configured to engage the driver member position datumsurface of the torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments thethrust face engagement with the driver member position datum surfacedefines a controlled distributed contact thrust interface configured todistribute, from the torsional motion driver member, a substantiallyuniform thrust load across a face of the dimensionally substantiallyinvariant interface.

In accordance with one or more aspects of the disclosed embodiments thetorque bar defines an end controlled thrust interface at each of thefirst end and the second end, wherein thrust loads are transferred fromeach of the end controlled thrust interfaces to a respective followerengagement surface of the torsional motion follower member.

In accordance with one or more aspects of the disclosed embodiments thethrust load transfer of torque from each of the end controlled thrustinterfaces to the respective follower engagement surface is asubstantially non-friction transfer.

In accordance with one or more aspects of the disclosed embodiments theend control thrust interfaces are disposed to have a predeterminedsubstantially constant location with respect to the torsional motionfollower member and the controlled distributed contact thrust interface.

In accordance with one or more aspects of the disclosed embodiments thefirst end includes a first wedge surface and the second end includes asecond wedge surface, wherein the first and second wedge surfaces areconfigured to engage with a respective first and second biasing memberto seat the dimensionally substantially invariant interface with respectto the follower member position datum surface and preload an end controlsurface of the biasing member.

In accordance with one or more aspects of the disclosed embodiments eachof the first and second biasing member includes a wedge engagementsurface to engage a respective one of the first and second wedgesurfaces, wherein the engagement between each biasing member and thefirst and second ends seats and stiffens the biasing members.

In accordance with one or more aspects of the disclosed embodimentscompression loads are transferred from the torsional motion drivermember to the thrust face of the dimensionally substantially invariantinterface and from the end control thrust interface of each of the firstand second ends to the torsional motion follower member so as to effecttransfer of the torsional motion and total torque from the torsionalmotion driver member across the dimensionally substantially invariantinterface substantially with the compression loads decoupled fromfriction loads.

In accordance with one or more aspects of the disclosed embodiments eachbiasing member is pinned to the torsional motion follower member so thatreaction loads are transferred to the torsional motion follower memberthrough the pins.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface is a substantiallyfrictionless coupling between the torsional motion follower member andthe torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments theexterior perimeter of the torsional motion driver member is wholly afree surface.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member is a pulley.

In accordance with one or more aspects of the disclosed embodiments apreloaded band to pulley coupling connected to the pulley.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member is an arm link.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is a drive shaft.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is a drive shaft of a multi-axis drivespindle.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is one of an inner drive shaft or anouter drive shaft of a multi-axis drive spindle.

In accordance with one or more aspects of the disclosed embodiments anarm link housing, wherein the torsional motion follower member furthercomprises at least one bearing seating the body portion on the bearingcollar, wherein bearing races of the at least one bearing depend fromthe arm link housing, independent of the torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments thebearing collar depends from the arm link housing independent of thetorsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments thebearing collar has a low thermal expansion coefficient.

In accordance with one or more aspects of the disclosed embodiments thebearing collar comprises a drive feature.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface is rigid andsubstantially invariant for each direction of the torque applied fromthe torsional motion driver member to the torsional motion followermember.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface is rigid andsubstantially invariant at a max torque in the applied direction andthroughout torque transients, wherein the direction of applied torque isswitched in an opposite applied direction to another max torque.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface is rigid andsubstantially invariant throughout the application of each torquetransient between the max torque and the other max torque.

In accordance with one or more aspects of the disclosed embodiments amethod is provided. The method including providing a torsional motionfollower member including a bearing collar and a body portion, whereinthe torsional motion follower member is coupled to a torsional motiondriver member via a dimensionally substantially invariant interface,wherein the bearing collar is decoupled from an exterior perimeter ofthe torsional motion driver member so that the exterior perimeter, as awhole, is free of the bearing collar.

In accordance with one or more aspects of the disclosed embodiments thebearing collar is decoupled from the dimensionally substantiallyinvariant interface.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member has a driver member position datumsurface and the torsional motion follower member has a follower memberposition datum surface, wherein the driver member position datum surfaceand the follower member position datum surface are in a predeterminedalignment setting a predetermined position of the torsional motiondriver member and the torsional motion follower member with respect toeach other.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface has a configuration thatcomplements the driver member position datum surface of the torsionalmotion driver member and the follower member position datum surface ofthe torsional motion follower member so that engagement therewith by thedimensionally substantially invariant interface effects a repeatablepredetermined position of the dimensionally substantially invariantinterface with respect to both the torsional motion follower member andthe torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments therepeatable predetermined position is a concentric position.

In accordance with one or more aspects of the disclosed embodimentsproviding a torque bar configured to couple the torsional motionfollower member to the torsional motion driver member, engagingsimultaneously the torsional motion driver member and the torsionalmotion follower member with the dimensionally substantially invariantinterface disposed on the torque bar and effecting transfer of torsionfrom the torsional motion driver member to the torsional motion followermember.

In accordance with one or more aspects of the disclosed embodiments thetorque bar includes a first end, a second end, and a thrust facedisposed between the first and second ends, wherein the thrust facedefines at least part of the dimensionally substantially invariantinterface, the method further comprising engaging the driver memberposition datum surface of the torsional motion driver member with thethrust face.

In accordance with one or more aspects of the disclosed embodimentsengaging the thrust face with the driver member position datum surfacedefines a controlled distributed contact thrust interface configured todistribute, from the torsional motion driver member, a substantiallyuniform thrust load across a face of the dimensionally substantiallyinvariant interface.

In accordance with one or more aspects of the disclosed embodiments thetorque bar defines an end controlled thrust interface at each of thefirst end and the second end, the method further comprising transferringthrust loads from each of the end controlled thrust interfaces to arespective follower engagement surface of the torsional motion followermember.

In accordance with one or more aspects of the disclosed embodimentstransferring the thrust loads from each of the end controlled thrustinterfaces to the respective follower engagement surface is asubstantially non-friction transfer.

In accordance with one or more aspects of the disclosed embodiments theend control thrust interfaces are disposed to have a predeterminedsubstantially constant location with respect to the torsional motionfollower member and the controlled distributed contact thrust interface.

In accordance with one or more aspects of the disclosed embodiments thefirst end includes a first wedge surface and the second end includes asecond wedge surface, the method further comprising engaging the firstand second wedge surfaces with a respective first and second biasingmember to seat the dimensionally substantially invariant interface withrespect to the follower member position datum surface and preload an endcontrol surface of the biasing member.

In accordance with one or more aspects of the disclosed embodiments eachof the first and second biasing member includes a wedge engagementsurface to engage a respective one of the first and second wedgesurfaces, wherein the engagement between each biasing member and thefirst and second ends seats and stiffens the biasing members.

In accordance with one or more aspects of the disclosed embodimentstransferring compression loads from the torsional motion driver memberto the thrust face of the dimensionally substantially invariantinterface and from the end control thrust interface of each of the firstand second ends to the torsional motion follower member so as to effecttransfer of the torsional motion and total torque from the torsionalmotion driver member across the dimensionally substantially invariantinterface substantially with the compression loads decoupled fromfriction loads.

In accordance with one or more aspects of the disclosed embodimentspinning each biasing member to the torsional motion follower member, andtransferring reaction loads to the torsional motion follower memberthrough the pins.

In accordance with one or more aspects of the disclosed embodiments thedimensionally substantially invariant interface is a substantiallyfrictionless coupling between the torsional motion follower member andthe torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments theexterior perimeter of the torsional motion driver member is wholly afree surface.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member is a pulley.

In accordance with one or more aspects of the disclosed embodiments apreloaded band to pulley coupling connected to the pulley.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member is an arm link.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is a drive shaft.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is a drive shaft of a multi-axis drivespindle.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member is one of an inner drive shaft or anouter drive shaft of a multi-axis drive spindle.

In accordance with one or more aspects of the disclosed embodimentsseating the body portion on the bearing collar with at least onebearing, wherein bearing races of the at least one bearing depend froman arm link housing, independent of the torsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments thebearing collar depends from the arm link housing independent of thetorsional motion driver member.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion follower member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments thetorsional motion driver member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments thebearing collar has a low thermal expansion coefficient.

In accordance with one or more aspects of the disclosed embodiments thebearing collar comprises a drive feature.

In accordance with one or more aspects of the disclosed embodiments asubstrate processing tool is provided. The substrate processing toolincluding a tool frame, and, a substrate transport connected to the toolframe and having a rotary drive member movably connected to so as torotate relative to the tool frame and generate a torque, a rotaryfollower member connected to the rotary drive member so as to followrotary drive member motion relative to the tool frame from the torqueimparted from the rotary drive member to the rotary follower member, anda rotary torque transfer coupling with a contact torque transferinterface, between the rotary drive member and the rotary followermember, that is a rigid, substantially non-slip interface configured sothe rigid, substantially non-slip interface has a predeterminedrepeatable bi-directional rigidity and substantially non-slip contact atthe contact torque transfer interface so as to effect bi-directionaltorque transfer of the torque, from the rotary drive member across therotary torque transfer coupling to the rotary follower member, viasubstantially non-friction transfer.

In accordance with one or more aspects of the disclosed embodiments therotary follower member is located at least partially inside the rotarydrive member, so that the rotary drive member is disposed around atleast part of the rotary follower member.

In accordance with one or more aspects of the disclosed embodiments therotary driver member is located at least partially inside the rotaryfollower member, so that the rotary follower member is disposed aroundat least part of the rotary drive member.

In accordance with one or more aspects of the disclosed embodiments thesubstrate transport apparatus is a high precision motion substratetransport apparatus.

In accordance with one or more aspects of the disclosed embodiments thehigh precision motion substrate transport apparatus has a high precisionmotion with a repeatability of motion of better than about 100 microns.

In accordance with one or more aspects of the disclosed embodiments therotary drive member has a driver member position datum surface and therotary follower member has a follower member position datum surface,wherein the driver member position datum surface and the follower memberposition datum surface are in a predetermined alignment setting apredetermined position of the rotary drive member and the rotaryfollower member with respect to each other.

In accordance with one or more aspects of the disclosed embodiments thecontact torque transfer interface has a configuration that complementsthe driver member position datum surface of the rotary drive member andthe follower member position datum surface of the rotary follower memberso that engagement therewith by the contact torque transfer interfaceeffects a repeatable predetermined position of the contact torquetransfer interface with respect to both the rotary follower member andthe rotary drive member.

In accordance with one or more aspects of the disclosed embodiments therepeatable predetermined position is a concentric position.

In accordance with one or more aspects of the disclosed embodiments thecontact torque transfer interface engages simultaneously the rotarydrive member and the rotary follower member and effects transfer oftorsion from the rotary drive member to the rotary follower member.

In accordance with one or more aspects of the disclosed embodiments therotary torque transfer coupling includes a first end, a second end, anda thrust face disposed between the first and second ends, wherein thethrust face defines at least part of the contact torque transferinterface and is configured to engage the driver member position datumsurface of the rotary drive member.

In accordance with one or more aspects of the disclosed embodiments thethrust face engagement with the driver member position datum surfacedefines a controlled distributed contact thrust interface configured todistribute, from the rotary drive member, a substantially uniform thrustload across a face of the contact torque transfer interface.

In accordance with one or more aspects of the disclosed embodiments therotary torque transfer coupling defines an end controlled thrustinterface at each of the first end and the second end, wherein thrustloads are transferred from each of the end controlled thrust interfacesto a respective follower engagement surface of the rotary followermember.

In accordance with one or more aspects of the disclosed embodiments thethrust load transfer of torque from each of the end controlled thrustinterfaces to the respective follower engagement surface is asubstantially non-friction transfer.

In accordance with one or more aspects of the disclosed embodiments theend control thrust interfaces are disposed to have a predeterminedsubstantially constant location with respect to the rotary followermember and the controlled distributed contact thrust interface.

In accordance with one or more aspects of the disclosed embodiments thefirst end includes a first wedge surface and the second end includes asecond wedge surface, wherein the first and second wedge surfaces areconfigured to engage with a respective first and second biasing memberto seat the rotary torque transfer coupling with respect to the followermember position datum surface and preload an end control surface of thebiasing member.

In accordance with one or more aspects of the disclosed embodiments eachof the first and second biasing member includes a wedge engagementsurface to engage a respective one of the first and second wedgesurfaces, wherein the engagement between each biasing member and thefirst and second ends seats and stiffens the biasing members.

In accordance with one or more aspects of the disclosed embodimentscompression loads are transferred from the rotary drive member to thethrust face of the rotary torque transfer coupling and from the endcontrol thrust interface of each of the first and second ends to therotary follower member so as to effect transfer of the torsional motionand total torque from the rotary drive member across the contact torquetransfer interface substantially with the compression loads decoupledfrom friction loads.

In accordance with one or more aspects of the disclosed embodiments eachbiasing member is pinned to the rotary follower member so that reactionloads are transferred to the rotary follower member through the pins.

In accordance with one or more aspects of the disclosed embodiments theexterior perimeter of the rotary drive member is wholly a free surface.

In accordance with one or more aspects of the disclosed embodiments therotary follower member is a pulley.

In accordance with one or more aspects of the disclosed embodiments apreloaded band to pulley coupling connected to the pulley.

In accordance with one or more aspects of the disclosed embodiments therotary follower member is an arm link.

In accordance with one or more aspects of the disclosed embodiments therotary drive member is a drive shaft.

In accordance with one or more aspects of the disclosed embodiments therotary drive member is a drive shaft of a multi-axis drive spindle.

In accordance with one or more aspects of the disclosed embodiments therotary drive member is one of an inner drive shaft or an outer driveshaft of a multi-axis drive spindle.

In accordance with one or more aspects of the disclosed embodiments anarm link housing, wherein the rotary follower member further comprisesat least one bearing seating the body portion on the bearing collar,wherein bearing races of the at least one bearing depend from the armlink housing, independent of the rotary drive member.

In accordance with one or more aspects of the disclosed embodiments thebearing collar depends from the arm link housing independent of therotary drive member.

In accordance with one or more aspects of the disclosed embodiments therotary follower member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments therotary drive member comprises stainless steel.

In accordance with one or more aspects of the disclosed embodiments thebearing collar has a low thermal expansion coefficient.

In accordance with one or more aspects of the disclosed embodiments thebearing collar comprises a drive feature.

In accordance with one or more aspects of the disclosed embodiments thecontact torque transfer interface is rigid and substantially invariantfor each direction of the torque applied from the torsional motiondriver member to the torsional motion follower member.

In accordance with one or more aspects of the disclosed embodiments thecontact torque transfer interface is rigid and substantially invariantat a max torque in the applied direction and throughout torquetransients the direction of applied torque is switched in an oppositeapplied direction to another max torque.

In accordance with one or more aspects of the disclosed embodiments thecontact torque transfer interface is rigid and substantially invariantthroughout the application of each torque transient between the maxtorque and the other max torque.

It should be understood that the foregoing description is onlyillustrative of the aspects of the disclosed embodiment. Variousalternatives and modifications can be devised by those skilled in theart without departing from the aspects of the disclosed embodiment.Accordingly, the aspects of the disclosed embodiment are intended toembrace all such alternatives, modifications and variances that fallwithin the scope of the appended claims. Further, the mere fact thatdifferent features are recited in mutually different dependent orindependent claims does not indicate that a combination of thesefeatures cannot be advantageously used, such a combination remainingwithin the scope of the aspects of the invention.

What is claimed is:
 1. A substrate processing tool comprising: a toolframe; and a substrate transport connected to the tool frame and having:a rotary drive member movably connected to so as to rotate relative tothe tool frame and generate a torque, a rotary follower member connectedto the rotary drive member so as to follow rotary drive member motionrelative to the tool frame from the torque imparted from the rotarydrive member to the rotary follower member, and a rotary torque transfercoupling with a contact torque transfer interface, between the rotarydrive member and the rotary follower member, that is a rigid,substantially non-slip interface configured so the rigid, substantiallynon-slip interface has a predetermined repeatable bi-directionalrigidity and substantially non-slip contact at the contact torquetransfer interface so as to effect bi-directional torque transfer of thetorque, from the rotary drive member across the rotary torque transfercoupling to the rotary follower member, via substantially non-frictiontransfer.
 2. The substrate processing tool of claim 1, wherein therotary follower member is located at least partially inside the rotarydrive member, so that the rotary drive member is disposed around atleast part of the rotary follower member.
 3. The substrate processingtool of claim 1, wherein the rotary driver member is located at leastpartially inside the rotary follower member, so that the rotary followermember is disposed around at least part of the rotary drive member. 4.The substrate processing tool of claim 1, wherein the substratetransport apparatus is a high precision substrate transport apparatus.5. The substrate processing tool of claim 4, wherein the high precisionmotion substrate transport apparatus has a high precision motion with arepeatable accuracy of motion of about or less than 25 μm.
 6. Thesubstrate processing tool of claim 1, wherein the rotary drive memberhas a driver member position datum surface and the rotary followermember has a follower member position datum surface, wherein the drivermember position datum surface and the follower member position datumsurface are in a predetermined alignment setting a predeterminedposition of the rotary drive member and the rotary follower member withrespect to each other.
 7. The substrate processing tool of claim 6,wherein the contact torque transfer interface has a configuration thatcomplements the driver member position datum surface of the rotary drivemember and the follower member position datum surface of the rotaryfollower member so that engagement therewith by the contact torquetransfer interface effects a repeatable predetermined position of thecontact torque transfer interface with respect to both the rotaryfollower member and the rotary drive member.
 8. The substrate processingtool of claim 1, wherein the rotary torque transfer coupling includes afirst end, a second end, and a thrust face disposed between the firstand second ends, wherein the thrust face defines at least part of thecontact torque transfer interface and is configured to engage the drivermember position datum surface of the rotary drive member.
 9. Thesubstrate processing tool of claim 8, wherein the first end includes afirst wedge surface and the second end includes a second wedge surface,wherein the first and second wedge surfaces are configured to engagewith a respective first and second biasing member to seat the rotarytorque transfer coupling with respect to the follower member positiondatum surface and preload an end control surface of the biasing member.10. The substrate processing tool of claim 9, wherein each of the firstand second biasing member includes a wedge engagement surface to engagea respective one of the first and second wedge surfaces, wherein theengagement between each biasing member and the first and second endsseats and stiffens the biasing members.
 11. The substrate processingtool of claim 10, wherein compression loads are transferred from therotary drive member to the thrust face of the rotary torque transfercoupling and from the end control thrust interface of each of the firstand second ends to the rotary follower member so as to effect transferof the torsional motion and total torque from the rotary drive memberacross the contact torque transfer interface substantially with thecompression loads decoupled from friction loads.
 12. The substrateprocessing tool of claim 11, wherein each biasing member is pinned tothe rotary follower member so that reaction loads are transferred to therotary follower member through the pins.
 13. The substrate processingtool of claim 1, wherein the exterior perimeter of the rotary drivemember is wholly a free surface.
 14. The substrate processing tool ofclaim 1, wherein the rotary follower member is a pulley.
 15. Thesubstrate processing tool of claim 14, further comprising a preloadedband to pulley coupling connected to the pulley.
 16. The substrateprocessing tool of claim 1, wherein the contact torque transferinterface is rigid and substantially invariant for each direction of thetorque applied from the torsional motion driver member to the torsionalmotion follower member.
 17. The substrate processing tool of claim 1,wherein the contact torque transfer interface is rigid and substantiallyinvariant at a max torque in the applied direction and throughout torquetransients, wherein the direction of applied torque is switched in anopposite applied direction to another max torque.